Development of the High-performance Synchronous Permanent Magnet Planar Motor and Its Key Technologies  

作　　者：寇宝泉[1] 张鲁[1] 邢丰[1] 李立毅[1] 张赫[1] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,黑龙江省哈尔滨市150001

出　　处：《中国电机工程学报》2013年第9期I0011-I0011,共1页Proceedings of the CSEE

基　　金：国家科技重大专项（2009ZX02207-001）; 新世纪优秀人才支持计划资助（NCET-08-0158）

摘　　要：永磁同步平面电机具有直接驱动、出力密度高、低热耗、高精度等特点,在现代精密、超精密加工装备,特别是在极紫外光刻机中具有广阔的应用前景。根据永磁阵列和线圈阵列的结构形式将永磁同步平面电机划分为组合式、半组合式、绕组层叠式和对称式永磁同步平面电机4类,并介绍了各种类型平面电机的特点,总结了永磁同步平面电机关键技术的发展现状,针对目前永磁同步平面电机存在的不足,讨论了未来永磁同步平面电机发展的趋势与方向。Lithography is one of the most important and complicated key equipment for the integrated circuit manufacture. The 2-D positioning device is the important subsystem of lithography. Compared with conventional 2-D positioning systems with cumbersome stacked arrangement, the 2-D positioning systems with planar motors have received increasing attention recently. Currently, many types of planar motors have been proposed. According to the operation principle, they can be classified into variable reluctance planar motors,

关 键 词：平面电机 光刻技术 永磁 同步 性能 集成电路制造 平版印刷技术 定位系统 

分 类 号：TN305[电子电信—物理电子学] TN305.7