高性能永磁同步平面电机及其关键技术发展综述  

Development of the High-performance Synchronous Permanent Magnet Planar Motor and Its Key Technologies

作　　者：寇宝泉[1] 张鲁[1] 邢丰[1] 李立毅[1] 张赫[1] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,黑龙江省哈尔滨市150001

出　　处：《中国电机工程学报》2013年第9期79-87,共9页Proceedings of the CSEE

基　　金：国家科技重大专项(2009ZX02207-001);新世纪优秀人才支持计划资助(NCET-08-0158)~~

摘　　要：永磁同步平面电机具有直接驱动、出力密度高、低热耗、高精度等特点,在现代精密、超精密加工装备,特别是在极紫外光刻机中具有广阔的应用前景。根据永磁阵列和线圈阵列的结构形式将永磁同步平面电机划分为组合式、半组合式、绕组层叠式和对称式永磁同步平面电机4类,并介绍了各种类型平面电机的特点,总结了永磁同步平面电机关键技术的发展现状,针对目前永磁同步平面电机存在的不足,讨论了未来永磁同步平面电机发展的趋势与方向。The synchronous permanent magnet planar motors （SPMPM） have many advantages such hs direct driving, high force density, low heat consumption, high accuracy, and has broad application prospects in modem precision, ultra precision machining equipments, especially in the extreme-UV lithography equipment. According to the structures of magnet and coil array, the SPMPM have been divided into four categories, e.g. combined planar motors, semi-combined planar motors, winding stacked planar motors and symmetric planar motors. Characteristics of each category were described. The development of the key technology of SPMPM was summa- rized. In accordance with the current problems, some possible development trends of the SPMPM are discussed at the last.

关 键 词：永磁同步平面电机 光刻机 二维平面定位装置 发展趋势 

分 类 号：TM359[电气工程—电机]