磁控溅射氧化钛薄膜的光学性能  

Optical properties of titanium oxide film by magnetron sputtering

作　　者：程芳[1] 黄美东[1] 王丽格[1] 杜姗[1] 唐晓红[1] 刘春伟[1] 

机构地区：[1]天津师范大学物理与电子信息学院,天津300387

出　　处：《天津师范大学学报（自然科学版）》2013年第1期55-58,共4页Journal of Tianjin Normal University：Natural Science Edition

基　　金：国家自然科学基金资助项目(61078059);天津师范大学学术创新推进计划资助项目(52X09038)

摘　　要：常温下,通过反应磁控溅射法在K9双面抛光玻璃基底上制备氧化钛薄膜.采用X线衍射(X-rayDiffraction,XRD)、光栅光谱仪和椭偏仪对氧化钛薄膜样品的结构和光学性能进行测试,并拟合分析得到薄膜的折射率和厚度等光学参数.结果表明:氧化钛纳米薄膜呈非晶态,其折射率和消光系数随波长的变化而变化,薄膜的透射率测量结果和理论计算结果在350～800 nm光波范围内吻合良好.由于氧化钛薄膜的折射率高且在可见光波段吸收小、呈透明状,是用来构成一维光子晶体的理想组分,有关其光学性能的基础研究对光子晶体的结构设计及其器件的开发应用具有积极的意义.A titanium oxide film was deposited at room temperature by magnetron sputtering onto K9 glass, of which both sides were polished. X-ray diffraction （XRD）, ellipsometer and grating spectrometer were employed to measure the structure and optical properties of the film, and the optical parameters including refractive index and thickness were obtained through fitting analysis. The results show that the titanium oxide nano-film is amorphous. The refractive index and extinction coefficient change with wavelength. The theoretically calculated transmittance spectrum is consistent well with the measured one within the range of 350-800 nm. The titanium oxide film, which has a high refractive index, is amorphous and transparent with very little absorption in the visible range, thus it is an ideal candidate component for one- dimensional photonic crystals. Basic research on optical properties of the film is of positive significance for structure design of photonie crystals and development and application of its device.

关 键 词：氧化钛薄膜 磁控溅射 透射率 折射率 光学性能 消光系数 晶体结构 

分 类 号：O434.13[机械工程—光学工程] O484.41[理学—光学]