贝叶斯网络在半导体设备故障诊断中的应用  

Application of Bayesian Network on Fault diagnosis of semiconductor equipment

作　　者：郝晓亮[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《电子工业专用设备》2013年第4期62-66,共5页Equipment for Electronic Products Manufacturing

摘　　要：介绍了贝叶斯网络的概念、组成部分、结构图和条件概率表以及如何建立贝叶斯网络。总结了贝叶斯网络在故障诊断中应用的具体步骤。通过反应离子刻蚀(RIE)的典型故障,阐述了基于贝叶斯网络的故障诊断技术在半导体设备故障诊断中的应用。The concept of Bayesian network is introduced Two part of Bayesian network ：structure graph and conditional probability table and how to establish Bayesian network are represented. The concrete steps of application of Bayesian network in fault diagnosis are summarized. The typical fault of R/E is illustrated to show the application of Bayesian network fault diagnosis in fault of semiconductor equipment

关 键 词：贝叶斯网络 反应离子刻蚀 智能故障诊断 

分 类 号：TN305[电子电信—物理电子学]