140GHz MEMS矩形波导滤波器  

MEMS rectangular waveguide filter at 140 GHz

作　　者：赵兴海[1] 单光存[2] 郑英彬[1] 杜亦佳[3] 陈颖慧[1] 鲍景富[3] 苏伟[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900 [2]香港城市大学物理与材料科学系 [3]电子科技大学,四川成都613800

出　　处：《红外与毫米波学报》2013年第2期165-169,共5页Journal of Infrared and Millimeter Waves

基　　金：中国工程物理研究院科学技术发展基金重点项目(2008A0403016);国家自然科学基金委员会和中国工程物理研究院联合基金资助项目(11176006)~~

摘　　要：设计并实现了一种采用微机械制造(MEMS)技术加工的D波段矩形波导膜片滤波器.采用有限元仿真软件HFSS分析了滤波器内腔镀膜厚度、粗糙度以及感性膜片厚度对滤波器主要性能的影响.采用MEMS深刻蚀工艺(DRIE)成功加工出了滤波器主体结构.通过完成结构深刻蚀、金属电镀和键合等关键工艺,首次制造出了D波段MEMS波导滤波器.样品测试结果为插入损耗0.4～0.7 dB,中心频率(140±3)GHz,带外抑制为≥18 dB,样品主要技术指标与设计值符合.The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DR/E method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of （ 140 ＋ 3 ） GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

关 键 词：波导滤波器 太赫兹 DRIE 

分 类 号：TN713[电子电信—电路与系统]