衬底和热处理温度对ZnO薄膜的微观结构的影响  

Effect of Substrates and Heat-treatment Temperature on the Microstructure of ZnO Film

作　　者：吴小亮[1] 丁士华[1] 杨晓静[2] 鲁云[3] 

机构地区：[1]西华大学材料科学与工程学院,四川成都610039 [2]西华大学能源与环境学院,四川成都610039 [3]千叶大学工学研究科

出　　处：《西华大学学报（自然科学版）》2013年第3期15-17,37,共4页Journal of Xihua University:Natural Science Edition

基　　金：国家自然科学基金(11074203);教育部春晖计划(Z2022077)

摘　　要：采用Sol-gel法,在普通载玻片和Si(100)上使用旋转涂覆技术制备了具有c轴择优取向生长的ZnO薄膜。利用XRD和SEM研究了衬底和热处理温度对ZnO薄膜的物相结构、表面形貌和(002)定向性的影响。结果表明,sol-gel旋涂法制备的ZnO薄膜为六角纤锌矿结构,玻璃衬底上生长的ZnO薄膜为多晶形态,Si(100)衬底表现出更优取向生长特性。随着热处理温度的升高,c轴择优取向程度逐渐增强,晶粒尺寸逐渐增大,ZnO的晶格参数先增加后减小。当温度在700℃时长出明显的柱状晶粒。Zinc oxide thin films with c-axis orientation on glass and Si（100） substrates were prepared by Sol-gel spin coating technique. The effect of substrates and heat-treatment temperature on phase structure , surface morphology and （002） orientation of ZnO films was investigated by XRD patterns and SEM images. The results show that the ZnO thin film preparing by sol-gel spin coating was hexagonal structure, ZnO thin film growing on glass substrates was polycrystalline form and the Si （100） substrate showed better oriented growth characteristics. With the gradual increase in heat treatment temperature, c-axis preferred orientation level and the grain size gradually increased, the lattice parameters of Zn0 first increased and then decreased. It grew the columnar grains obviously when the temperature was 700 ℃.

关 键 词：SOL-GEL法 C轴取向 ZNO薄膜 热处理 

分 类 号：O484.1[理学—固体物理]