1.06μm波段大口径无规位相板制作与性能测试  

FABRICATION AND PERFORMANCE MEASUREMENT OF A LARGE APERTURE RANDOM PHASE PLATE AT 1.06μm WAVELENGTH

作　　者：黄惠杰[1] 路敦武[1] 王润文[1] 赵永凯[1] 刘增水[1] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800

出　　处：《强激光与粒子束》2000年第1期55-57,共3页High Power Laser and Particle Beams

基　　金：国家 8 63惯性约束聚变领域资助课题

摘　　要：利用大面积光刻和腐蚀等工艺 ,研制成功了一块用于激光直接驱动约束聚变装置的 1 .0 6μm波段、口径为 2 50 mm的无规位相板。台阶几何深度实测值与理论值的相对偏差为 1 .2 4 % ,该位相板可获得边缘陡直、近似平顶的焦斑光强分布。WT5”BZ]A large aperture random phase plate (RPP) for target plane laser beam smoothing at 1.06μm wavelength was fabricated using large aperture exposure and dilute HF etching processes. The RPP's clear aperture is φ 250mm. The measured average step height is 1.060μm at 5 locations on the RPP, which has a relative deviation of 1 24% to the theoretical value. A focal spot with very sharp edges and nearly flat top overall envelop intensity distribution was obtained at the focal plane of a focusing lens. These results show the fabrication techniques for RPP is effective, and is easily scalable to even larger apertures. [WT5”HZ]

关 键 词：无规位相板 靶面均匀辐照 焦斑光强分布 ICF 

分 类 号：TL639[核科学技术—核技术及应用]