工况参数对类金刚石膜摩擦学性能的影响  

Growth and Tribological Property Characterization of Diamond-Like-Carbon Films

作　　者：曾群锋[1] 于飞[1] 董光能[1] 毛军红[1] 林凯生[2] 

机构地区：[1]西安交通大学现代设计及转子轴承系统教育部重点实验室,西安710049 [2]广州有色金属研究院,广州510651

出　　处：《真空科学与技术学报》2013年第4期377-381,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家973计划资助项目(2009CB724206);国家自然科学基金项目(51175406)

摘　　要：采用非平衡磁控溅射技术在高速钢基体上以C2H2为反应气源制备了含氢类金刚石(DLC)膜。使用激光拉曼光谱仪、X射线光电子能谱仪和原子力显微镜分析和观察了DLC膜的微观结构及表面形貌,结果表明:DLC膜表面由纳米级别的圆形颗粒堆积而成,其结构呈现出DLC的典型Raman光谱特征,薄膜中的碳元素主要以sp2C键、sp3C键和C-O键的形式存在。以GCr15钢球为摩擦配副,在球盘式摩擦磨损试验机上考察了DLC膜在大气干摩擦条件下的摩擦学性能。实验结果发现:在摩擦初始阶段,DLC膜的摩擦系数从实验开始到达峰值的时间随着载荷和速度的增大都是减少的;而在摩擦稳定阶段,DLC膜的平均摩擦系数随着载荷和速度的增大先减小后增大;速度对DLC膜摩擦系数的影响比载荷更加显著。用扫描电子显微镜观察了磨痕形貌并分析了磨损机理:DLC膜的磨损特征主要为以犁沟现象为主的粘着磨损。随着速度的增加,磨痕表面犁沟现象变弱;而随着载荷的增加,磨损表面的犁沟现象变明显。The diamond-like-carbon（DLC）films were deposited by unbalanced magnetron sputtering with C2H2 as the carbon source on high speed steel substrates. The micmstructures and tribological properties of the DLC films were characterized with atomic force microscopy, scanning electron microscopy, Raman spectroscopy and X-rayphotoelectron spectroscopy. The preliminary results show that the typical DLC films significantly improve the microstructures and tribo- logical properties of the substrates. For example, the DLC films considerably increased the surface micro-hardness and wear-resistance. The time it takes for the friction coefficient to reach its peak decreases with the increases of the load and sliding velocity in the initial stage of the test. The wear tracks indicated an adhesion wear mechanism.

关 键 词：非平衡磁控溅射 类金刚石膜 结构分析 摩擦磨损性能 

分 类 号：TH117.1[机械工程—机械设计及理论]