水银微流体惯性开关的制作与测试  

Fabrication and test of mercury micro-fluidic inertial switch

作　　者：徐媛[1] 杨涛[1] 蔺怡[1] 刘婷婷[1] 陈光焱[2] 王超[2] 

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《传感器与微系统》2013年第5期114-117,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金委员会和中国工程物理研究院联合基金资助项目(11076024);四川省教育厅重大培育项目(07ZZ038);四川省教育厅重大培育项目(11ZA216)

摘　　要：针对传统微机械"固—固"型触点开关存在触点磨损、接触不稳定、导通电阻大、抗干扰能力差等缺点,设计制作了一种利用水银液滴在变矩形截面微通道中的流动来实现通断的微流体惯性开关。利用阳极键合和DRIE技术制作了开关微通道,采用溅射沉积方式沉积了Cr金属薄膜,分别通过离心转台和加速度传感器测试了开关的准静态阈值和冲击阈值,实验测试结果分别为8.525,5.09 gn。实验结果表明:冲击阈值较准静态阈值小。To solve disadvantages such as contact wear, contact instability, high on-resistance and signal bounce of the traditional micro-mechanical switch based on solid-solid contact, a micro-fluidic inertial switch is developed, which utilizes moving mercury droplet in micro-channel with varying rectangular cross section to close the switch. Anodic bonding and DRIE technology are adopted to fabricate micro-channel and sputtering method is employed to deposit Cr film and quasi static threshold and impact threshold are obtained which are 8. 525 g and 5.09 g,, respectively by using centrifugal turntable and acceleration sensor. Experimental result shows that quasi static threshold is greater than impact threshold.

关 键 词：惯性开关 微流体 微机械加工 准静态阈值 冲击阈值 测试 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]