用于光气动探测的微流量传感器  

Micro-flow Sensor for Opto-pneumatic Detection

作　　者：赵永翠[1] 何秀丽[1] 赵玲[1] 李建平[1] 高晓光[1] 贾建[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《仪表技术与传感器》2013年第3期1-3,6,共4页Instrument Technique and Sensor

基　　金：国家高技术研究发展计划资助项目(2009AA04Z328)

摘　　要：针对气体红外吸收的气动探测应用,设计了基于MEMS技术的Sandwich结构硅基微流量传感器。在1 mm2面积内制备了阻值约1.6 kΩ的蛇形Pt薄膜作为加热及测温电阻,其电阻-温度系数(TCR)约2.2×10-3/℃.Pt薄膜采用4μm厚氮化硅悬梁作支撑,在125℃工作温度下功耗约44 mW.研究了Pt薄膜电阻对的间距以及工作温度对微流量传感器性能的影响,并将其用于CO2气体检测。在0～1 mL/min的测试范围内,该微流量传感器输出信号与气体流量成线性关系,理论检测下限约8.5μL/min,可用于气体红外吸收的气动探测。A silicon-based micro-flow sensor with Sandwich structure was designed according to the mechanism of opto-pneumatic detection and fabricated by micro-electro-mechanical system（MEMS） technology.A snaky platinum film resistor of 1.6 kΩ with the temperature coefficient of resistance of 2.2×10^-3/ ℃ was fabricated as the heater and the thermometer.The platinum film was supported by beams of 4 μm silicon nitride and the power consumption is 44 mW at the operating temperature of 125 ℃.The effects of the space between two platinum resistors and the working temperature on the properties of the micro-flow sensor were investigated and the sensor was applied for CO2 gas detection.The developed micro-flow senor exhibits linear relationship between signal and gas flow with the flow range from 0 to 1 mL/min and the detection limit is about 8.5 μL/min,which are suitable for opto-pneumatic detection for infrared gas absorption.

关 键 词：非分光红外 光气动探测 微流量传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]