渗硼高速钢表面CVD金刚石膜制备研究  

Preparation of CVD Diamond Film on Borided High Speed Steel

作　　者：王浩[1] 卢文壮[1] 薛海鹏[1] 孙达飞[1] 张林[1] 左敦稳[1] 

机构地区：[1]南京航空航天大学机电学院,江苏省精密与微细制造技术重点实验室,南京210016

出　　处：《人工晶体学报》2013年第4期572-576,共5页Journal of Synthetic Crystals

基　　金：江苏省高校优势学科建设工程资助项目;国家自然科学基金(51075211;51275230);教育部博士点基金(20113218110018);南京航空航天大学研究生创新基金(kfjj20110226)

摘　　要：直接在高速钢表面生长CVD金刚石非常困难。为了克服高速钢中Fe元素对金刚石生长的不利影响,在高速钢表面利用渗硼技术先生成B、Fe的化合物的中间层然后再制备CVD金刚石膜。采用显微维氏硬度计、XRD衍射仪、扫描电子显微镜、激光拉曼光谱和洛氏硬度计对渗硼基体和金刚石膜进行检测,研究渗硼处理对高速钢基体和金刚石膜生长的影响。结果表明:渗硼热处理可以在高速钢表面形成一层致密的B、Fe化合物层,能有效降低Fe元素的不利影响,有利于金刚石的生长,在高速钢表面形成一层高附着的致密金刚石膜。It is very difficult to deposit CVD diamond on high speed steel. In order to overcome the adverse effect of Fe on diamond deposition, the boronization method was used to generate B, Fe compound intermediate layer on the surface of high speed steel. CVD diamond film was deposited on the borided high speed steel. Vivtorinox hardness mierostructure, X-ray diffraction, scanning electron microscopy, laser Raman spectroscopy and Rockwell hardness tester were used to investigate the effects of boronization on high speed steel substrate and diamond film depositied. The results show that the boronization heat treatment forms a layer of dense B, Fe compound material on the surface of high speed steel, which can effectively isolate the iron. The borided surface is good for continuous high adhesion CVD diamond film deposition.

关 键 词：CVD金刚石膜 高速钢 渗硼 

分 类 号：O484[理学—固体物理]