闭环微加速度计非线性补偿  

Nonlinearity Compensation of the Close-Loop Micro-Accelerometer

作　　者：谢国芬[1] 杜连明[1] 刘显学[1] 唐彬[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《微纳电子技术》2013年第5期292-297,共6页Micronanoelectronic Technology

基　　金：中国工程物理研究院科技发展基金重点课题资助项目(2010A0302013);中国工程物理研究院超精密加工技术重点实验室资助项目(2012CJMZZ00003)

摘　　要：离心标定修正微加速度计的非线性存在周期长和成本高等缺点,寻找一种可以提高生产效率的修正办法具有重要意义。推导了理想情况下加速度计的工作原理,并对载波带来的附加静电力对测试结果的影响进行了分析。在引入闭环平衡时结构非对称因子后推导出导致非线性的公式,找到了影响闭环平衡后结构非对称的三个主要因数:寄生电容、结构本身不对称和伺服电路零位的偏差。分析了各个因素在闭环平衡状态对结构非对称的影响原理后,相应提出了提高加速度计线性度的方法。最后介绍了非线性补偿的工程实现方法,并对环境温度变化较大时的补偿方法给出了建议。实验表明,该技术切实可行,能将加速度计的非线性特性提高将近一个数量级。There are many disadvantages to correct the nonlinearity of the accelerometer with cen- trifuges such as time-consuming, high cost and so on. It is meaningful to find an alternative method to improve the production efficiency. The operating principle of the accelerometer in the ideal case is deduced, and the effects of the additional electrostatic force exerted by the carrier on the test results are analyzed. The equation on resulting in the nonlinearity is deduced by conside- ring the closed-loop balanced structural asymmetry factor. Three main factors leading to the closed-loop structural asymmetry are located, the parasitic capacitance, asymmetry of structure itself and zero deviation of the servo circuit. After analyzing the effects of these factors above, the solutions are proposed accordingly to improve the linearity of the accelerometer. Finally, the engineering nonlinear compensation method is introduced, and the compensation method consi- dering large temperature variation is also suggested. The experimental results show that this technology can increase the nonlinearity of the accelerometer by about one order of magnitude.

关 键 词：微加速度计 非对称因子 寄生电容 电路零偏 非线性补偿 

分 类 号：TH703[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]