基于Modelica的光刻机超精密工件台建模与仿真  

Modeling and Simulation of Ultra-precision Stage for Lithography Based on Modelica

作　　者：陈鹏飞[1] 王彦伟[1] 

机构地区：[1]华中科技大学国家CAD支撑软件工程技术研究中心,湖北武汉430074

出　　处：《湖北工业大学学报》2013年第2期72-75,共4页Journal of Hubei University of Technology

基　　金：国家自然科学基金资助(51075162)

摘　　要：采用Modelica语言,建立光刻机超精密工件台仿真模型库,并在Mworks平台上进行联合仿真.仿真结果验证了模型的正确性,表明工件台的定位精度符合光刻机的设计要求.该仿真模型库包括直线电机模型、工件台动力学模型、PID控制器模型、逆变器模型等子模型,还可进行轨迹规划算法的比较分析,为光刻机超精密工件台的设计和改进提供了重要的分析工具和方法.A model library of ultra-precision stage for lithography was established in Modelica. The library mainly includes PMLSM, mechanical system,PID controller and inverter. The system of the stage was simulated in Mworks .The results verify the accuracy of the model library and demonstrate that the stage can realize the performance of ultra-precision absolutely. Meanwhile, the model library can make a compar- ative analysis for different profile planning methods, which provides the lithography design with important methods.

关 键 词：MODELICA 超精密工件台 直线电机 PID控制器 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]