干式涡旋真空泵的发展与关键问题  

Development and key problems of the dry scroll vacuum pump

作　　者：黄英[1] 李建军[1] 韩晶雪[1] 张以忱[1] 

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110004

出　　处：《真空》2013年第3期26-29,共4页Vacuum

摘　　要：涡旋真空泵是一种无油容积式机械真空泵,具有结构简单,有效容积利用系数大,压缩比大,在较宽的压力范围内具有较稳定的抽速,真空度高,驱动力矩小,功率变化小,振动噪声低,可靠性高等优点。本文介绍了涡旋真空泵的发展、目前不同结构型式产品的工作原理、间隙和密封、结构特点、存在的技术问题及相应的解决方法等。Scroll vacuum pump, a kind of oil-free positive displacement vacuum pump, has a lot of advantages, such as simple structure, big effective volume utilization coefficient and compression ratio, stable pumping speed over a wide pressure range, high vacuum degree and reliability, small driving torque and power variation, low noise and so on. This article introduces the development process, the operating principles of the products with different structures at present, the clearance and seal, the structural characteristics, as well as the technical problems and corresponding solutions of the dry scroll vacuum pump.

关 键 词：真空泵 涡旋 无油 抽速 真空度 

分 类 号：TB752.2[一般工业技术—真空技术]