Highly-compliant,conformal and stretchable microelectrode arrays  

作　　者：Zhang Hongzhi Xie Lei Yu Mei Liu Zhiyuan Li Yuchun Yu Zhe 

机构地区：[1]Biomedical Microdevices Research Laboratory,Shenzhen Institutes of Advanced Technology,Chinese Academy of Sciences [2]Key Laboratory for Health Informatics,Chinese Academy of Sciences

出　　处：《Engineering Sciences》2013年第3期72-75,共4页中国工程科学（英文版）

基　　金：National Natural Science Foundation of China (No. 61102042);Youth Innovation Foundation of Chinese Academy of Sciences;Shenzhen"Peacock Plan"to Z.Y.

摘　　要：Most biological tissues are supple and elastic, while current electronic devices fabricated by semiconductors and metals are usually stiff and brittle. As a result, implanted electronic devices can irritate and damage surrounding tissues, causing immune reaction and scarring. In this work, we develop stretchable microelectrode arrays, with the development of a novel soft lithography technology, which are designed and fabricated with a polymer/stretchable metal/polymer sandwich structure. With the great deformability of stretch, compression, bend and twisting, while preserving electrical property, this technology overcomes the fundamental mismatch of mechanical properties between biological tissues and electronic devices, and provides highly-compliant, confonnal and stretchable bio-electronic interfaces. Here we also describe the following three applications of the stretchable electrode arrays： a. monitoring intracranial electroencephalography （EEG）; b. stimulating peripheral nerves to drive muscles; c. monitoring epicardial electrocardiography （ECG）. Stretchable microelectrode arrays create a promising field in biomedical applications for its better modulus match with biological tissues and robust mechanical and electrical properties. They allow for construction of electronic integrated circuits spread over on complex and dynamic curved surfaces, providing a much friendlier bio-electronic interface for diagnosis, treatment and in- telligent bio-control.

关 键 词：biological micro-electro-mechanical system （bioMEMS） microelectrode array EEG neural prosthesis ECG 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP316[自动化与计算机技术—控制科学与工程]