接触式台阶测量仪弹性支承机构的仿真设计  

Design of elastic bearing mechanism in step height contact measuring instrument

作　　者：白立芬[1] 李庆祥[1] 薛实福[1] 王云庆[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2000年第8期18-20,共3页Journal of Tsinghua University(Science and Technology)

基　　金：国家"八五"科技攻关项目 !(85 - 70 4- 0 2 - 11) ;国家自然科学基金项目 !(5 9875 0 5 2

摘　　要：为合理设计接触式台阶测量仪 ,建立了它的简化数学模型 ,经理论计算 ,结果与理论值有较大误差。通过有限元分析软件、采用 8节点 6面体单元计算模型对机构进行数字仿真和分析。触针允许最大测量力为 8.2 6 7N,测量力变化率为 33.8N /m ,片簧回转中心偏移量约为 1μm 。The measuring mechanism is the key part of a step height contact measuring instrument which uses a lever mechanism with two crossed elastic bearings to measure the step height. The mechanisim design was improved by contructing a simplified mathematical model to theoretically design the mechanism. Since the simplified model introduced some errors into the specifications of the measuring mechanism, Algor FEM software was used to simulate and analyze the design result. The FEM model used 8 node hexahedrons. The simulation result shows that the largest measuring force is 8.267N, the force change ratio is 33.8N/m and the offset of the bearing torsion center is 1μm. Thus, the measuring mechanism meets the need for high precision step height contact measurements.

关 键 词：台阶仪 接触测量 弹性支承 

分 类 号：TH710.2[机械工程—测试计量技术及仪器]