计算凹面闪耀光栅衍射效率的通用方法  

General Calculation Method of Diffraction Efficiency of Concave Blazed Gratings

作　　者：李亭[1] 黄元申[1] 徐邦联[1] 李柏承[1] 张大伟[1,2] 陶春先[1] 凌进中[1] 庄松林[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]南洋理工大学电子与电机工程学院,新加坡639798

出　　处：《光谱学与光谱分析》2013年第7期1997-2001,共5页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(60908021);国家科技支撑计划(2011BAF02804);国家重大科学仪器设备开发专项(2011YQ15004);海市研发公共服务平台项目(11DZ2290300)资助

摘　　要：为使凹面光栅的衍射能量更多地集中在所需要的级次上,提出了利用机械刻划的方法在凹面基底上制作变刻槽角度的凹面闪耀光栅,并利用菲涅耳-基尔霍夫衍射公式推导了同时在主截面和非主截面内计算凹面闪耀光栅衍射效率的理论方法,弥补了以往只在主截面内考虑衍射效率的不足,最后利用Matlab仿真软件模拟了衍射效率随波长的变化曲线,并对比了在不同制作和使用参数下衍射效率峰值的变化规律,为今后凹面光栅的设计和制作提供了参考价值。In order to make diffraction energy of concave gratings more concentrated in the desired order, the present paper puts forward that the concave blazed grating with variable groove angles could be fabricated on the concave substrates by mechanical ruling method, and the theoretical method of simultaneously calculating the diffraction efficiency in the main section and non- main section is deduced by using Fresnel-Kirchhoff＇s diffraction formula, which makes up the shortage of the diffraction efficien- cy calculated only in the main section. Finally, the diffraction efficiency curves varied with wavelength is simulated by Matlab software, and the variation laws of the diffraction efficiency are compared for different production methods and application parameters, which provides a valuable reference for the design and production of the concave gratings.

关 键 词：凹面闪耀光栅 衍射效率 菲涅耳衍射 数值积分法 

分 类 号：O433.4[机械工程—光学工程]