衬底温度对Zn_(0.98)Cr_(0.02)O薄膜结构和磁性的影响  

Effect of substrate temperature on structure and magnetism of Zn_(0.98)Cr_(0.02)O thin films

作　　者：付长凤[1] 高宇飞[1] 刘超[1] 韩连福[1] 

机构地区：[1]东北石油大学电子科学学院,黑龙江大庆163318

出　　处：《光学仪器》2013年第3期80-83,共4页Optical Instruments

基　　金：国家自然科学基金资助项目(51101027)

摘　　要：采用磁控溅射法在Si(100)衬底上制备了Zn0.98Cr0.02O薄膜。利用X射线衍射仪(XRD)、X射线光电子能谱分析仪(XPS)、扫描电子显微镜(SEM)和综合物性测量系统(PPMS)对所制备的样品进行了结构、成分、形貌和磁性能分析,研究了衬底温度对薄膜的结构、形貌和磁性能的影响。XRD分析表明,Zn0.98Cr0.02O薄膜样品具有纤锌矿结构,呈c轴择优取向生长;XPS显示薄膜样品中的Cr离子是+3价。磁性测量表明,Zn0.98Cr0.02O薄膜具有明显的室温铁磁性,且随着衬底温度的升高,薄膜的铁磁性逐渐减弱。Zn0.98Cr0.02O thin films were deposited on Si （100） substrates by using magnetron sputtering method. The structure and magnetic properties of the films were characterized by X-ray diffractrometry （XRD）, X-ray photoelectron spectroscopy （XPS）, scanning electron microscopy （SEM） and physical property measurement system （PPMS）. The effects of substrate temperature on the structures, composition, surface morphology and magnetic properties of the films were studied. XRD patterns show that Zn0.98Cr0.02O thin films with a preferential c-axis orientation exhibit the wurtzite structure. XPS spectra reveals that the Cr ions are in a ＋ 3 charge state in the films. Magnetization measurements indicate that the Zn0.98Cr0.02O samples exhibit ferromagnetic behavior. Moreover, the ferromagnetic properties become weaker with the increase of the substrate temperature.

关 键 词：衬底温度 ZN0 98Cr0 02O薄膜 磁性 磁控溅射 

分 类 号：O484[理学—固体物理]