新型真空传输机械手设计研究  

Research for New Type Vacuum Transmission Manipulator

作　　者：李学威 冯亚磊 马壮 王凤利 张金果 

机构地区：[1]新松机器人自动化股份有限公司,辽宁沈阳110168

出　　处：《机械设计与制造》2013年第6期197-199,共3页Machinery Design & Manufacture

基　　金：国家科技重大专项/IC装备机械手及硅片传输系统系列产品研发与产业化(2009ZX02012)

摘　　要：作为半导体行业的关键元件,晶圆对晶圆传输机械手的要求非常高。针对传统真空机械手在刚度、洁净度及寿命等方面的不足,提出一种新型连杆式真空传输机械手结构,可实现平面内任意直线轨迹规划运动,不仅结构简单,洁净度高,而且有效的提高了刚度及使用寿命。同时,根据真空传输机械手的结构建立其分析模型,推导运动学公式,对机械手驱动臂同步控制运动及电机同步控制精度进行了仿真分析,阐述了插值次数与运动精度之间的联系并优化得到最佳插值次数,为真空机械手机构的优化设计和平稳控制提供了理论基础。As a key element in the semiconductor industry,the wafer puts forward very high request for the wafer transfer robot.It presents a new type of manipulator aiming at the disadvantage of traditional vacuum transmission manipulator in terms of stiffness,cleanliness,life,.etc,which can realize moving along any straight lines in the plane,and the robot not only has simple structure and higher cleanliness but also improve the rigidity and working life of the robot.Moreover,the kinematics formulas are derived based on the analysis model of the vacuum transmission manipulator,meanwhile the simulation analysis for the synchronous motion control and control accuracy of the robot arm is carried on,and the best interpolation number is derived according to analysis the relationship between the interpolation number and the motion precision of the robot,providing the theoretical basis for the optimization design and steady control of the manipulator.

关 键 词：晶圆 真空传输机械手 控制特性 轨迹规划 同步控制 运动精度 

分 类 号：TH16[机械工程—机械制造及自动化] TP242.202[自动化与计算机技术—检测技术与自动化装置]