石墨烯压力传感器的研究进展  

Research Progresses of Graphene-Based Pressure Sensors

作　　者：蒋圣伟[1] 师帅[1] 袁娇娇[1] 方靖[1] 徐春林[1] 汪学方[1] 

机构地区：[1]华中科技大学机械科学与工程学院微系统中心,武汉430074

出　　处：《微纳电子技术》2013年第7期447-452,457,共7页Micronanoelectronic Technology

基　　金：华中科技大学自主创新基金资助项目(2013TS022);中央高校基本科研业务费专项资金资助项目

摘　　要：对几种石墨烯压力传感器的研究进展进行了综述,包括压力传感器结构、原理及其电学、力学与机械等性能的研究,并指出了各种石墨烯压力传感器的优缺点。从中可以发现,石墨烯压力传感器比硅压力传感器具有更优异的性能,包括高量程、高灵敏度以及纳米级尺寸。这些优点预示石墨烯压力传感器将有望在更多场合得到应用,如在生物医学领域可被用来检测人体内部血压或者组织压力。目前,石墨烯压力传感器的研究主要是理论与实验研究,实现商业化还需要一段时间,但是石墨烯的制备已实现商业化,石墨烯压力传感器也将走进人们的生活。The research progresses for several kinds of graphene-based pressure sensors are re- viewed, including the researches of the structure, principle, electrical and mechanical properties for pressure sensors. The advantages and disadvantages of various kinds of graphene-based pres- sure sensors are pointed out. It is found that the properties of graphene-based pressure sensors are superior to those of silicon-based pressure sensors, including the high range, high sensitivity and nanoscale size. These advantages indicate that graphene-based pressure sensors will be proba- bly applied to more occasions, for example, it can be used to detect the human body internal blood pressure or tissue pressure in the biomedical field. At present, the researches on graphene- based pressure sensors are mainly theoretical and experimental, it will take some time for sensors to achieve commercialization. But the commercial production of the graphene has been achieved, the graphene-based pressure sensors will also come into people＇s lives later.

关 键 词：石墨烯 压力传感器 高量程 高灵敏度 纳米级 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]