光电定角比相法检测圆光栅测量精度的提高  

Improvement of measurement precision of circular raster by photoelectric phase-comparing method for angle positioning

作　　者：张红胜[1] 冯长有[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130021

出　　处：《光学精密工程》2000年第5期482-486,共5页Optics and Precision Engineering

摘　　要：用公式推导说明了影响光电定角比相法检测圆光栅刻划误差测量精度的因素 ,并用两台测量精度不同的仪器做了实验验证。文中提出 ,在仪器稳定 ,主轴回转精度高的前提下 ,再采用分光裂相法读数 ,异或门鉴相、“内插法”、“对称联系法”等措施 。Formula is used to explain the factors affecting the measurement precision of score errors of the circular raster by photoelectric phase-comparing method for angle positioning. It is proved that, under the conditions of high stability of the instrument and high turning precision of principal axis, the higher measurement precision can be achieved by using spectroscopic phase-splitting method for reading system, inverted OR gate for phase-discrimination, interpolation method and symmetry relation method.

关 键 词：圆光栅 刻划误差 测量精度 光电定角比相法 

分 类 号：TH741.6[机械工程—光学工程]