水氨或/和六甲基二硅氮烷表面处理碱催化二氧化硅增透膜结果的对比研究  

Comparison of Base-catalyzed Silica Antireflective Coatings Modified by Different Surface Treatments of Water-NH3and/or Hexamethyldisilazane Vapors

作　　者：霍艳芳[1] 罗荣辉[1] 苏永钢[1] 

机构地区：[1]郑州大学物理工程学院,郑州450001

出　　处：《光子学报》2013年第7期823-827,共5页Acta Photonica Sinica

摘　　要：针对溶胶-凝胶法制备的1/4波长二氧化硅增透膜耐环境性差的缺点,对其进行了水氨或/和六甲基二硅氮烷的表面处理,并对单一气氛处理和两种气氛联合处理后的膜层性质进行了对比研究.展现了膜层经各项表面处理后物理性质和微观结构的变化,以及两种气氛联合处理时因处理顺序不同而引起的最终结果的差异.研究表明:水氨蒸汽处理促进了膜层粒子间表面羟基的交联,膜层较处理前厚度降低,但耐摩擦性增强,光学透过率基本保持不变;硅氮烷蒸汽处理向膜层引入了甲基,膜层极性较低,粒子间作用力因此降低,耐摩擦性下降,但疏水性得到良好的改善;先水氨后硅氮烷蒸汽处理时,水氨蒸汽的前处理在提高膜层耐摩擦的同时降低了表面羟基的数量,使后续硅氮烷处理时强度降低,故两步处理后膜层保持了较好的耐摩擦性和一定的疏水性;而先硅氮烷后水氨蒸汽处理时,硅氮烷蒸汽的前处理明显改善了膜层的疏水性,却因膜层表面羟基减少、间距增大而降低了水氨蒸汽的处理强度,耐摩擦性虽有较大提高,但稍弱于单一水氨蒸汽处理时的耐摩擦性.Aiming at the shortcoming that base-catalyzed quarter-wave silica antireflective coatings, prepared by sol-gel method, are porous and therefore low environment-resistant, water/NH3 vapor and/or hexamethyldisilazane vapor were utilized to modify the surface of these coatings to obtain high hydrophobicity and abrasion-resistance. Otherwise, comparison between different modified results from single vapor and combined vapors, were carried out to show the changes of coatings＇ physical properties and microstructures after different surface modifications and the influence of the treated order of combined vapors to the result coatings. According to the investigations, some conclusion can be drawn that water-ammonia vapor treatment facilitates the cross-link between hydroxyl groups in coatings, which reduces the film thickness, strengthens the abrasion-resistance, and simultaneously maintains the high transmittance ; hexamethyldisilazane vapor treatment introduces methyl groups into coatings, making the polarity of coating surface and the interaction between particles decreased obviously, leading to poorer abrasion-resistance but fortunately, distinctly improved hydrophobicity; when coatings are treated by water-ammonia combined hexamethyldisilazane vapor, the water-ammonia vapor ttrstty strengthens the abrasion-resistance and meanwhile reduces the amount of hydroxyl groups which hindered the later hexamethyldisilazane vapor treatment, finally obtaining AR coatings with good abrasion-resistance and a certain extent of hydrophobicity; when coatings are treated by hexamethyldisilazane combined water-ammonia vapor, the hexamethyldisilazane vapor obviously improves the hydrophobicity but weakens the effect of water-ammonia vapor, resulting in a slight weaker abrasion-resistance compared to that after single water-ammonia vapor treatment.

关 键 词：薄膜光学 溶胶-凝胶法 二氧化硅增透膜 表面处理 水氨 六甲基二硅氮烷 

分 类 号：O613.72[理学—无机化学]