调幅W(Mo)/Cu纳米多层膜He^+离子辐照响应行为  

Microstructure evolution of W(Mo)/Cu nanometer multilayer films under He^+ ion irradiation

作　　者：植超虎[1] 刘波[1] 任丁[1] 杨斌[1] 林黎蔚[1] 

机构地区：[1]四川大学原子核科学技术研究所,教育部辐射物理及技术重点实验室,成都610064

出　　处：《物理学报》2013年第15期357-362,共6页Acta Physica Sinica

基　　金：科技部国际热核聚变实验堆(ITER)计划专项;偏滤器关键技术研究(批准号:2011GB110005);国家自然科学基金(批准号:11075112;11005076);教育部博士重点基金(批准号:20100181120112)资助的课题~~

摘　　要：用磁控溅射技术制备不同调幅波长(L)的W(Mo)/Cu纳米多层膜,所制膜系在60keV氦离子(He+)辐照条件下注入不同剂量:0,1×1017He+/cm2,5×1017He+/cm2.用X射线衍射仪(XRD)和高分辨透射电子显微镜(TEM)表征W(Mo)/Cu纳米多层膜辐照前后微观结构.研究结果表明:1)He+离子轰击引起温升效应是导致沉积态亚稳相β-W转变成稳态α-W相的主因,而与调幅波长无明确关联;2)纳米多层结构中W(Mo)和Cu膜显现出的辐照耐受性与调幅波长相关,调幅波长越小,抗He+的辐照性能越强;3)在5×1017He+/cm2注入条件下,观察到He团簇/泡在纳米结构W(Mo)和Cu膜中的积聚行为存在明显差异:在W(Mo)膜中He团簇/泡的分布与晶粒取向相关,He团簇/泡倾向于沿W(211)晶面分布;而Cu膜非晶化且He团簇/泡在其体内呈均匀分布.W（Mo, 9.8 at.%）/Cu nanometer multilayer films of different individual layer thickness were prepared by RF magnetron sputtering, which were irradiated by 60 keV He ＋ ions at ion fluence from 0 to 5 × 10^17 He^＋/cm^2. Microstructures of nanometer multilayer W（Mo）/Cu films were investigated by high-resolution transmission electron microscope （HRTEM） and X-ray diffraction （XRD） before and after irradiation. Experimental results indicate that： （1） The phase transformation of β-W （A-15） into steady state α-W can be attributed to the bombardment effect of energetic He ions on the surface of films, leading to phase-transition temperature during irradiation. （2） The irradiation tolerance of W（Mo）/Cu multilayer film was found to depend on the individual layer thickness. （3） At the fluence of 5 × 10^17 He^＋/cm^2, the HRTEM results reveal that the behavior of helium cluster/bubble in the W（Mo） film is obviously different from that in the Cu film. It is interesting that the distribution of helium cluster/bubble is related to the grain orientation of W（Mo） film and tends to distribute along W （211） plane. However, Cu film is completely amorphized and helium cluster/bubble is evenly distributed in it.

关 键 词：W(Mo)/Cu纳米多层膜 He+辐照 He团簇/泡 相转变 

分 类 号：O484.43[理学—固体物理] TB383.1[理学—物理]