聚碳酸酯表面射频磁控溅射类金刚石薄膜的摩擦学性能  

Tribological Properties of Diamond-like Carbon Films on Polycarbonate by Radio Frequency Magnetron Sputtering

作　　者：程春玉[1] 蔺增[1] 王凤[2] 巴德纯[1] 

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819 [2]沈阳发动机设计研究所,沈阳110015

出　　处：《中国表面工程》2013年第4期50-54,共5页China Surface Engineering

基　　金：辽宁省自然科学基金(201202058);中央高校基本科研业务费专项资金(N110403002)

摘　　要：采用射频磁控溅射方法在聚碳酸酯片(PC)上沉积了类金刚石薄膜。利用激光拉曼光谱和扫描电子显微镜对薄膜的形貌及结构进行分析;采用表面粗糙度仪和球—盘式摩擦磨损试验机对薄膜的摩擦学性能进行测试。结果表明:利用射频磁控溅射方法在聚碳酸酯片上沉积的薄膜具有类金刚石特征;射频功率和直流偏压对sp3键含量有较大影响,并影响镀膜后聚碳酸酯材料的表面粗糙度。The diamond-like carbon（DLC）films were prepared on polycarbonate（PC）by radio frequency magnetron sputtering method. The microstructure and morphologies of diamond-like carbon films were investigated by means of laser Raman spectroscopy and scanning electron microscopy （SEM）.The tribological properties of the DLC films were tested by surface roughness tester and pin-on-disc tester. The results show that the thin films have typical diamond-like carbon characteristics. The incident power and DC bias have great effect on the sp3 content, which affects the surface roughness.

关 键 词：聚碳酸酯 类金刚石薄膜 射频磁控溅射 摩擦学性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理] TG115.58[金属学及工艺—金属学]