High hydrosilylation efficiency of porous silicon SiHx species produced by Pt-assisted chemical etching for biochip fabrication  

作　　者：XIAO MinYu HAN HuanMei XIAO ShouJun 

机构地区：[1]State Key Laboratory of Coordination Chemistry,School of Chemistry and Chemical Engineering,Nanjing National Laboratory of Microstructures,Nanjing University [2]Jinan Entry-Exit Inspection and Quarantine Bureau Inspection

出　　处：《Science China Chemistry》2013年第8期1152-1163,共12页中国科学（化学英文版）

基　　金：the financial support of the National Basic Research Program of China(2013CB922101);the National Natural Science Foundation of China(20827001,91027019,21021062)

摘　　要：Porous silicon （PSi） prepared from Pt metal-assisted chemical etching （MACE） was demonstrated to possess higher hydrosi- lylation efficiency （-57%） than anodized PSi （-11%） by surface reaction with co-undecenyl alcohol （UO）. Deconvolution of the SiHx （x = 1-3） stretching bands revealed the abundance of SiH2 species on MaCE PSi was 53%, -10% higher than on ano- dized samples, while both of Sill1 and Sill3 were -5% lower correspondently on MaCE PSi than on anodized samples. The surface SiHx abundances were suggested to account for the higher hydrosilylation efficiency on MaCE PSi. Optimization of Pt-assisted chemical etching parameters suggested a 7-15 nm thick Pt-coating and an etching time of 3-10 min for biochip ap- plications. Scanning electron microscopy images revealed that an isotropic top meso-porous layer was beneficial for hydrosi- lylation and long-term durability under ambient conditions. To end, an example of histidine-tagged protein immobilization and microarray was illustrated. Combining the materials＇ property, surface chemistry, and micro-fabrication technology together, we envision that silicon based biochip applications have a prosperous future.Porous silicon (PSi) prepared from Pt metal-assisted chemical etching (MaCE) was demonstrated to possess higher hydrosilylation efficiency (～57%) than anodized PSi (～11%) by surface reaction with ω-undecenyl alcohol (UO).Deconvolution of the SiHx (x=1-3) stretching bands revealed the abundance of SiH 2 species on MaCE PSi was 53%,～10% higher than on anodized samples,while both of SiH 1 and SiH 3 were ～5% lower correspondently on MaCE PSi than on anodized samples.The surface SiHx abundances were suggested to account for the higher hydrosilylation efficiency on MaCE PSi.Optimization of Pt-assisted chemical etching parameters suggested a 7-15 nm thick Pt-coating and an etching time of 3-10 min for biochip applications.Scanning electron microscopy images revealed that an isotropic top meso-porous layer was beneficial for hydrosilylation and long-term durability under ambient conditions.To end,an example of histidine-tagged protein immobilization and microarray was illustrated.Combining the materials' property,surface chemistry,and micro-fabrication technology together,we envision that silicon based biochip applications have a prosperous future.

关 键 词：metal-assisted chemical etching porous silicon surface chemistry HYDROSILYLATION BIOCHIP 

分 类 号：TN405[电子电信—微电子学与固体电子学]