MEMS双光纤位移声传感器设计与分析  

Design and analysis of the MEMS dual fiber optic displacement acoustic sensor

作　　者：李晓龙[1] 王江安[1] 吴亚明[2] 

机构地区：[1]海军工程大学电子工程学院,湖北武汉430033 [2]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《红外与激光工程》2013年第9期2505-2509,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(51109217)

摘　　要：提出了一种新型强度调制型光纤传感器的理论模型。该模型使用单模光纤,讨论了光在准直透镜中的传播规律,利用光学透镜的准直作用,即矩阵光学原理和高斯耦合理论实现光强调制。强度型光纤传感器采用微电机系统MEMS结构的压力振动膜片拾取振动位移,通过分析施加在膜片上压力的变化及膜片尺寸得到影响双光纤位移传感器灵敏度的相关参数。仿真结果表明:合理的选择参数可以使传感器的灵敏度在不增加结构复杂性的前提下较传统方法有103量级的提高。A new intensity modulated optic microphone theory model was introduced. Single-mode optical fiber here was used to realize collimation of beam. The propagation law in collimation lens was discussed, and light intensity modulation using matrix optical principle and Gaussian coupling theory was realized. The system contains MEMS pressure vibration membrane to pick up vibration displacement. Through the analysis of membrane size and the change of pressure, the related parameters about the sensitivity of fiber optic displacement sensor could be acquired. Simulation results show that the proper choice of parameters can make the sensitivity of sensor improve in orders of 10^3 magnitude than traditional light intensity modulated methods in condition of no increasing the complexity of structure.

关 键 词：MEMS 调制 传感器 

分 类 号：TN918.11[电子电信—通信与信息系统]