16～17GHz体声波延迟线技术研究  

Study on Bulk Acoustic Wave Delay Line with 16-17GHz Delay Line

作　　者：江洪敏[1] 马晋毅[1] 陈运祥[1] 石越[1] 伍平[1] 余新晓[1] 张传志[1] 李洪平[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2013年第5期620-623,共4页Piezoelectrics & Acoustooptics

摘　　要：通过优化高频低损耗换能器设计、极薄压电薄膜生长、微波网络匹配、高频气密封外壳的电磁兼容设计等技术,研制出了工作在16～17GHz的微波声体波延迟线,其带宽为1 098MHz,延迟时间0.34μs,插入损耗-54dB,三次渡越抑制28dB,直通抑制44dB。Through optimizing high frequency and low loss transducer design, extra thin piezoelectric film depo- sition, microwave matching network, and EMC of high frequency hermetic seal package,a microwave bulk acoustic wave delay line operated at 16-17 GHz has been developed in this work. The bandwidth of 1 098 MHz,delay time of 0. 358 μs, insertion loss of --54 dB, triple transmitting suppression（TTS） of 28 dB, feed through suppression of 44 dB have been achieved.

关 键 词：声体波 延迟线 换能器 压电薄膜 

分 类 号：TN65[电子电信—电路与系统]