直流脉冲偏压协同射频等离子体对PET膜的表面改性  

Surface Modification of Polyethylene Terephthalate Membrane by DC Pulse-Biased Exposure of RF Plasma

作　　者：解艳凤[1] 施芸城[1] 黄晓江[1] 石建军[1] 郭颖[1] 

机构地区：[1]东华大学理学院,上海201620

出　　处：《真空科学与技术学报》2013年第9期893-897,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金青年科学基金(11005017)

摘　　要：利用协同射频等离子体对聚对苯二甲酸乙二醇酯(PET)膜进行表面改性,主要研究了直流(DC)脉冲偏压协同作用对PET膜表面快速(15 s)处理效果的影响。实验表明:DC脉冲偏压作用后PET表面润湿性得到了明显的改善,接触角可在15 s的处理时间内降到20°。改性后的PET与Au膜的剥离力比未处理样品提升了近6倍。场发射扫描电镜测试结果发现,薄膜表面刻蚀现象明显,表面粗糙程度增加。经过X射线光电子能谱分析表明,改性后的PET表面生成了大量的含氧极性官能团,使得表面含氧量有了很大的提高。结果表明DC脉冲偏压可快速有效地提高PET膜表面粗糙程度和含氧官能团数量,进而影响其亲水性和表面黏结性,为进一步改善等离子体表面改性工艺提供了依据。The surfaces of polyethylene terephthalate （PET） membrane were modified by exposure of DC pulse-bi- ased RF plasma. The impacts of the surface modification conditions, including the plasma exposure time, D C pulse, and temperature on its hydrophilicity and cohesiveness were evaluated. The modified PET surfaces were characterized with X- ray photoelectron spectroscopy, field emission scanning electron microscopy, and the conventional surface probes. The re- suits show that the plasma exposure strongly affected the PET microstructures and properties. For example, a plasma expo- sure for 15 s reduoed its water contact angle to 20~,and increased the adhesion at the interface of gold film and PET sub- strate by 6 times, possibly because of formation of increased numbers of oxygen-containing,polar functional groups on the roughened PET surfaces.

关 键 词：脉冲偏压 PET膜 射频等离子体 表面改性 

分 类 号：O539[理学—等离子体物理]