振动式微机械陀螺仪的研究现状与展望  

Current Status and Outlook of Vibrating Micro-machined Gyroscopes Research

作　　者：张霞[1] 

机构地区：[1]西安邮电大学电子工程学院,西安710100

出　　处：《固体电子学研究与进展》2013年第5期447-453,457,共8页Research & Progress of SSE

基　　金：西安邮电大学青年教师科研基金项目(101-0477)

摘　　要：在多种类型的陀螺仪中,以振动式微机械陀螺仪最具代表性,且具有丰富的研究基础和很高的市场占有率。首先介绍了各种检测方式的振动式微机械陀螺仪的国内外研究现状,对各种类型陀螺仪的结构、加工工艺、工作方式、性能指标等进行了详细的阐述,并对振动式微机械陀螺仪的发展趋势进行了展望。振动式微机械陀螺仪不仅要向高精度、高稳定性的导航等领域继续发展,同时也需要兼容低性能要求的民用领域。随着加工技术的不断进步和应用领域的扩展,小型化、三轴一体化、新材料将成为振动式微机械陀螺仪的研究热点。The vibrating micro-mechanical gyroscope is the most representative gyroscope and has rich research foundation and high market share among many types of gyroscopes. Firstly, the research status of the vibrating micro-machined gyroscopes with various detection methods is in- troduced, and each kind of vibrating micro-mechanical gyroscope is elaborated for structure, technigue, operating principle, performance and so on. Meanwhile, the trend of the vibrating mi- cro-machined gyroscopes is discussed. The vibrating micro-machined gyroscopes not only develop towards the navigation and other fields with high precision and high stability, but also need to be compatible for the civilian areas with lower performance requirements. With the progress of the processing technology and the expansion of the application fields, miniaturization, triaxial inte- gration and new materials will attract increasing attention in the field of the vibrating micro-ma- chined gyroscopes.

关 键 词：微电子机械系统 振动式陀螺仪 电容检测 压阻检测 压电检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V241.5[自动化与计算机技术—控制科学与工程]