粉末溅射SnO_2:Pt薄膜及SnO_2/SnO_2:Pt薄膜电导在CO中的振荡现象  

THE CONDUCTANCE OSCILLATION PHENOMENON OF POWER SPUTTERING SnO_2:Pt AND SnO_2/SnO_2:Pt FILM IN CO

作　　者：刘文利[1] 李蕾[1] 高建华[1] 

机构地区：[1]山东工业大学数理系,山东济南250014

出　　处：《山东大学学报（自然科学版）》2000年第4期437-441,共5页Journal of Shandong University(Natural Science Edition)

摘　　要：采用粉末溅射方法制备了体掺杂型SnO2 :Pt薄膜和SnO2 /SnO2 :Pt双层膜 .这两种薄膜材料不仅对CO气体有很高的灵敏度 ,良好的选择性和较低的工作温度 ,而且其电导在CO气体中均出现了振荡现象 .本文分析了电导振荡温区、振幅和频率与CO气体浓度及膜厚的关系 。Two kinds of bulk doped thin films,a SnO 2:Pt film and a double layer SnO 2/SnO 2:Pt film,were deposited by powder sputtering method.Both the thin films not only showed high sensitivity,good selectivity and lower operating temperature to CO gas,but also the film conductance exhibited an interesting oscillation phenomenon at about 200 ℃ in CO.The influence of CO concentration and the film thickness on oscillation properties was studied.The characteristics of socillation were introduced and some relative problems were discussed.

关 键 词：气敏器件 粉末溅射 薄膜 振荡 半导体材料 电导 

分 类 号：TN304.055[电子电信—物理电子学] O472.1[理学—半导体物理]