一种新型集成微麦克风和扬声器的设计  

Design of a New Integrated Microphone and Microspeaker

作　　者：任天令[1] 张林涛[1] 刘理天[1] 李志坚[1] 

机构地区：[1]清华大学微电子所,北京100084

出　　处：《电子器件》2000年第4期233-237,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金!( 6980 60 0 7)

摘　　要：:基于现有的硅基 Pb(Zr,Ti) O3 (PZT)铁电薄膜的制备工艺 ,提出了一种用于微麦克风和扬声器的新型 PZT悬臂式振膜结构。对这种悬臂结构的结构参数进行了优化设计 ,并对其灵敏度和声输出进行了理论分析。结果表明采用这种 PZT悬臂式结构的微麦克风和扬声器的性能有望超过以往文献中报道过的微麦克风和扬声器。Based on the fabrication process of PZT thin films, a new PZT cantilever structure applied to the integrated microphone and microspeaker is proposed. The structure parameters are optimized theoretically. The sensitivity and output sound pressure of this device are calculated. Differences between PZT and ZnO cantilever structures show that the properties of this PZT based microphone and microspeaker should be better than other kinds of microphones and microspeakers reported before.

关 键 词：集成微麦克风 微扬声器 铁电薄膜 设计 

分 类 号：TN640.2[电子电信—电路与系统]