硅微机械陀螺仪测控电路的温度补偿  

Temperature compensation of monitoring circuit for silicon MEMS gyroscope

作　　者：曹慧亮[1] 李宏生[1] 王寿荣[1] 杨波[1] 黄丽斌[1] 

机构地区：[1]东南大学仪器科学与工程学院微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096

出　　处：《光学精密工程》2013年第12期3118-3125,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60974116;No.61101021;No.61104217);江苏省自然科学基金资助项目(No.BK2010401)

摘　　要：提出了一种基于微机械陀螺仪测控电路进行温度补偿的方法。介绍了本课题组自主研发的SHH17#陀螺结构,分析了温度变化对陀螺的影响,并对驱动和检测模态的谐振频率,品质因数以及标度因数和零偏进行了测试。分析了陀螺结构的动力学方程以及测控电路,指出了标度因数与驱动幅度和检测回路增益成正比,与两模态频差成反比。以热敏电阻为补偿元件在检测次级放大器中补偿标度因数,然后以直流叠加的方法在低通滤波器模块对零偏的温度系数和输出值进行了补偿,并介绍了补偿参数的配置方法。实验显示,经过温度补偿,标度因数和零偏的温度系数分别由393×10-6·℃-1和75(°)·h-1·℃-1减小到了73×10-6·℃-1和20(°)·h-1·℃-1,补偿后0℃零偏值由89.59mV减小到7.33mV,标度因数和零偏的温度系数分别减小了80%和73%。得到的结果证明了补偿方法的正确性和可行性。A temperature compensation method was proposed based on the periphery circuit of a Microelectronic-mechanical System（MEMS） gyroscope.The structure of SHH17 # MEMS gyroscope developed by ourselves was introduced,the effect of temperature changes on the gyroscope was analyzed,and the resonant frequency,quality factor,scale factor and the null bias of driving and sensing modes were tested.The dynamic equation and test circuits of the gyroscope were analyzed,then it points out that the scale factor is in direct proportion to driving amplitude and the gain of sense loop,and is in indirect proportion to the frequency gap between two modes.A thermal resistant was taken as the compensation element to compensate the scale factor in a secondary amplifier,then the temperature coefficients and output values of the null bias were compensated by superposing a reference voltage within the low pass filter in an output module.Furthermore,the circuits of the two compensation points were expanded and the parameter＇s configuration details were introduced.Experiments indicate that the temperature coefficients of scale factor and null bias have reduced from 393 × 10 · ℃-6 and 75 （°） · h-1 · ℃-1 to 73×10-6 · ℃-1 and 20（°） · h-1 · ℃-1 respectively（reduce by 80％ and 73％）and the null bias values have decreased from 89.95 mV to 7.33 mV.These results demonstrate that the proposed method is feasibility and correction.

关 键 词：硅微机械陀螺仪 测温电路 温度补偿 标度因数 零偏 热敏电阻 

分 类 号：U666[交通运输工程—船舶及航道工程]