基于毛纽扣的LTCC微波模块垂直互连技术  

Vertical Interconnection Techniques for LTCC Microwave Modules on Basis of Fuzz-button

作　　者：徐利[1] 王子良[1,2] 胡进[1] 陈昱晖[1] 郭玉红[1] 

机构地区：[1]南京电子器件研究所,南京210016 [2]微波毫米波单片集成和模块电路重点实验室,南京210016

出　　处：《固体电子学研究与进展》2013年第6期538-541,共4页Research & Progress of SSE

摘　　要：基于独立的二维LTCC微波模块间的垂直互连技术展开研究,采用了一种三线型毛纽扣微波垂直互连结构并使用三维电磁仿真软件HFSS对三线型毛纽扣垂直互连结构的模型进行分析与优化。通过对相应工艺的研究,制作了三线型毛纽扣垂直互连样品,其中毛纽扣的高度为3mm,直径为0.5mm。样品测试结果与仿真结果相符,在X波段插入损耗小于1.5dB,回波损耗大于15dB。Based on the vertical interconnection techniques for 2D LTCC（Low temperature co-fired ceramic） microwave modules, a three-button vertical microwave interconnection tech-nique is proposed in this paper. The three-button vertical microwave interconnection structure was simulated and optimized by using HFSS. With the corresponding processes, the three-button vertical interconnection module was made and tested. The height of the fuzz-button is 3 mm,and the diameter is 0.5 mm. The test results are in agreement with the simulation data. The inser-tion loss of the module is less than 1.5 dB, and the return loss is more than 15 dB in X-band.

关 键 词：三维多芯片组件 低温共烧陶瓷 三线型毛纽扣 微波垂直互连 

分 类 号：TN811[电子电信—信息与通信工程]