气流式微机械倾角敏感元件的建模及流场分析  

Modeling and flow field analysis for MEMS tilt angle sensor

作　　者：林建华[1] 朴林华[1] 张福学[1] 

机构地区：[1]北京信息科技大学传感技术研究中心,北京100192

出　　处：《北京信息科技大学学报（自然科学版）》2013年第6期59-62,共4页Journal of Beijing Information Science and Technology University

基　　金：北京市自然科学基金会资助项目(4112020);北京市传感器重点实验室资助项目(KF20131077203);(KF20131077205)

摘　　要：针对三维模型下气流式微机械倾角敏感元件内部流场分布和铂丝热敏电阻的辐射情况,利用FLUENT-CFD软件,通过建立模型、划分网格、求解等途径,采用Boussinesq假设对微机械倾角敏感元件内部流场进行了计算。计算结果表明:微机械敏感元件水平状态时,距离2铂丝热敏电阻上对称等距离的2节点气流速度都等于1.85×10-3m/s;在倾斜状态下2节点的气流速度差会随着倾斜角度的增加而变大。选择离散坐标下DO辐射模型,定量计算出铂丝热敏电阻对空气的辐射量为1 682 W/m2。The 3D model of MEMS tilt angle sensor internal flow field distribution and the thermal resistance radiation are researched. By using the FLUENT-CFD software, through modling, calculation and solution, the inner flow field of the sensor is calculated by Boussinesq hypothesis. The results show as follows ： When the sensor is horizontal, air velocity of the two symmetric nodes on the equal distance from platinum thermistor is equal to 1.85 ×10^-3 m/s;The airflow speed difference of two nodes will become bigger with the increase of angle in the condition of tilt state. Selecting the DO radiation model of discrete coordinates, the air radiation of platinum thermistor is quantitatively calculated as 1 682 w/m^2.

关 键 词：微机电系统 三维建模 Boussinesq假设 

分 类 号：TP379[自动化与计算机技术—计算机系统结构] TN37[自动化与计算机技术—计算机科学与技术]