微装配系统结构设计及位移台误差分析  

Structure Design of Micro-Assembly and Error Analysis of Displacement Instrument

作　　者：张嘉易[1] 路超[1] 郝永平[1] 

机构地区：[1]沈阳理工大学辽宁省先进制造与装备重点实验室,辽宁沈阳110159

出　　处：《机械设计与制造》2014年第1期128-130,共3页Machinery Design & Manufacture

基　　金：国家863计划资助项目(2009AA04Z167);辽宁省自然科学基金(201102182)

摘　　要：针对平板类微小零件装配特点,设计了一套基于真空吸附的微装配系统平台。采用真空吸附式微夹持器实现零件的夹持、释放,采用双CCD摄像头实现对零件的位姿识别,采用定位精度在(4~6)μm的位移台实现零件的定位。分析了位移台误差的来源,重点计算了位移台中步进电机和丝杠的累积误差,计算结果为(±1.405)μm,可以达到位移台的精度要求。重复定位精度对位移台精度起着重要的作用,以位移台中光栅尺为基准进行闭环控制,通过大量实验验证位移台的重复定位精度小于3μm。A iming at the characteristics of flat and small parts assembly, a set of micro-assembly systems platform based on vacuum suction is designed. The vacuum adsorption micro-gripper parts realize clamping and placing. The double CCD cameras achieve the pose and position parameters recognition. Positioning accuracy of displacement instrument in the of （4- 6）μm is t^sed to part orientation. Error source of displacement table is introduced, and it emphatically calculates the accumulated error of stepper motor and leads screw in the displacement table. The calculated results is （±1.405）μm within a reasonable range. The reorientation accuracy plays important role in accuracy of displacement instrument basing on the close load control of grating, and the re-orientation accuracy of less than 3μm is verified by lots of experiments.

关 键 词：微装配 真空吸附 位移台 累积误差 重复定位精度 

分 类 号：TH16[机械工程—机械制造及自动化] TP705[自动化与计算机技术—检测技术与自动化装置]