SU-8胶长细比效应的分子动力学模拟  

Molecular Dynamics Simulation of SU-8 Photoresist Slenderness Ratio Effects

作　　者：尚海鑫 褚金奎[1,2] 高佳丽[1,2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室 [2]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《高分子材料科学与工程》2014年第1期96-99,共4页Polymer Materials Science & Engineering

基　　金：国家重点基础研究发展规划项目(2011CB302101;2011CB302105);国家自然科学基金资助项目(51175056)

摘　　要：运用分子动力学(MD)的研究方法,经过分子聚合、能量最优化和退火模拟等构建了不同长细比的SU-8光刻胶模型,模拟研究了在室温条件下不同长细比的SU-8胶纳米尺寸模型的弹性模量、泊松比、剪切模量等力学性能参数。结果表明,在室温下,随着SU-8胶模型长细比的增加,材料的杨氏模量和剪切模量逐渐增大,这一现象与微尺度SU-8胶模型的实验结果一致,表明有效长细比是微尺度下表征材料力学性能和尺寸效应的一个重要参数。Molecular dynamic simulation was applied to build SU-8 photoresist models with different slenderness ratios by employing molecule polymerization, energy optimization and anneal simulation, and investigate mechanical properties of microscale SU-8 photoresist by calculating the elastic Modulus, Poisson＇ s ratio, shear modulus etc at room temperature. The results show that the elastic modulus and shear modulus of materials gradually increase with the increase of the SU-8 photoresist model slenderness ratio at room temperature. This phenomenon is consistent with experiment results of the microscale SU-8 photoresist model, which indicates that the effective slenderness ratio is an important parameter for the mechanical properties and size effect of microscale characterization.

关 键 词：SU-8光刻胶 力学性能 分子动力学 长细比 

分 类 号：O631.1[理学—高分子化学]