非球面光学元件的面形检测技术  

Surface testing methods of aspheric optical elements

作　　者：师途 杨甬英[1] 张磊[1] 刘东[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《中国光学》2014年第1期26-46,共21页Chinese Optics

基　　金：国家自然科学基金资助项目(No.11275172);中央高校基本科研业务费专项资金资助项目(No.2013QNA5006);现代光学仪器国家重点实验室创新基金资助项目(No.MOI201208)

摘　　要：介绍了非球面各加工阶段的面形检测技术及其最新进展,重点介绍了非球面精密抛光期的面形检测技术,并对其中的非零位子孔径拼接干涉检测法和部分补偿法进行了详细阐述,提出了适用于大口径、深度非球面面形检测的组合干涉法的概念。概述了近年来受到关注的自由曲面非球面的发展和检测技术现状,展望了非球面检测技术的发展趋势。In this paper , several aspheric testing methods for different fabrication steps and their new research progresses are introduced .Especially , we emphasis on the testing methods for precision polishing step , in which subaperture stitching interferometric testing and non-null partial compensating testing method are de-scribed in detail .Moreover , several combined interferometric testing methods which perform well in measuring large and steep aspherics are introduced .In addition , we provide a general description of free-form surface testing .The further development of aspheric surface testing methods is also prospected .

关 键 词：非球面检测 非球面加工 组合干涉检测 自由曲面 

分 类 号：TQ171.65[化学工程—玻璃工业] TN247[化学工程—硅酸盐工业]