Al_2O_3对CaO-R_2O-SiO_2/ZrO_2基LTCC材料结构性能的影响  

Effects of Al_2O_3 on microstructure and properties of LTCC material based on CaO-R_2O-SiO_2/ZrO_2

作　　者：罗建[1] 钟朝位[1] 张旭[1] 崔毓仁[1] 王乔升 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《电子元件与材料》2014年第3期20-23,共4页Electronic Components And Materials

摘　　要：采用高温熔融法在1 350℃制备了CaO-R2O-SiO2玻璃粉料,系统研究了Al2O3的添加量对CaO-R2O-SiO2/ZrO2基LTCC玻璃/陶瓷材料结构与性能的影响规律。研究结果表明,适量添加Al2O3可促进主晶相生长,提高材料结构稳定性,使其具有良好的力学电学性能。当Al2O3添加质量分数达7.5%时,850℃下可制得抗弯强度为183 MPa、相对介电常数为7.19、介电损耗为0.22%、电阻率>5×1 013?·cm的CaO-R2O-SiO2/ZrO2基LTCC玻璃/陶瓷材料。The CaO-R2O-SiO2 glass powder was prepared at 1 350 ℃ by high temperature melting method. The influence rules of additions of Al2O3 on LTCC based on CaO-R2O-SiO2/ZrO2 glass/ceramic material microstructure and properties were studied systematically. The results show that appropriate addition of Al2O3 can promote the growth of the main crystalline phases and can improve the structure stability of materials, the materials have good mechanical electrical performances.When the mass fraction of Al2O3 is 7.5%, LTCC glass/ceramic material with bend strength of 183 MPa, relative permittivity of 7.19, dielectric loss of 0.22%, resistivity of more than 5 ×10^13Ω· cm, can be prepared at 850 ℃.

关 键 词：低温共烧陶瓷 ZRO2 Al2O3 高温熔融法 玻璃 陶瓷复合材料 电子封装材料 

分 类 号：TB34[一般工业技术—材料科学与工程]