一种高效低成本制作三维聚焦微流沟道的方法  

A Highly Efficient and Low-Cost Method for Fabricating ThreeDimensional Focusing of Microfluidic Channels

作　　者：杨潞霞[1,2,3] 毛静[1,2] 郝晓剑[1,2] 张斌珍[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术重点实验室,太原030051 [3]山西大学商务学院信息学院,太原030031

出　　处：《微纳电子技术》2014年第3期181-185,193,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61176115)

摘　　要：为了使用微流体细胞仪实现对细胞的精确计数,设计和制作了能够真正实现三维聚焦功能的微流沟道。首先用Ansys软件对微流沟道的结构进行了优化设计,利用斜曝光工艺制作了SU-8微流沟道模具;然后利用聚二甲基硅氧烷(PDMS)对SU-8模具进行倒模,得到其负模结构,对负模结构进行表面处理后,进行二次倒模,得到与原SU-8微流沟道结构一致的PDMS复制品;最后用荧光检测方法对封装好的PDMS微流沟道的封装和聚焦效果进行了测试。结果表明:该芯片结构可靠,可以满足进一步的流体聚焦检测要求,采用该方法生产的微流沟道具有生产周期短、成本低、效率高和结构可靠的特点。In order to realize the accurate count of cells using the microfluidic cytometer, the microfluidic channel with the real three-dimensional focusing function was designed and fabricated. Firstly, the structure of the microfluidie channel was optimized by the Ansys software. The SU-8 microfluidic channel mold was fabricated by the oblique exposure lithographic process. Then the reverse mould for the SU-8 mold was achieved with the polydimethylsiloxane （PDMS）, and the PDMS negative mode structure was obtained. After the surface treatment of the PDMS negative mode structure, the secondary reverse mould was carried out, and the PDMS duplicate was obtained to be consistent with the original SU- 8 microfluidic channel structure. Finally, the packaging and focusing effects of the packaged PDMS microfluidic channel were test by the fluorescence detection method. The results show that the structure of the chip is reliable and meets the requirement of the further fluid focus detection, and the microfluidic channel fabricated with the method has characteristics of the short production cycle, low cost, high efficiency and reliable structure.

关 键 词：微流沟道 三维聚焦 SU-8 聚二甲基硅氧烷(PDMS) 倒模 

分 类 号：TH703[机械工程—仪器科学与技术] TN305[机械工程—精密仪器及机械]