基于梁膜结构的MEMS高g值加速度传感器  

MEMS High-g Accelerometer Based on Beam-membrane Structure

作　　者：李晓博[1] 赵玉龙[1] 程荣俊[1] 

机构地区：[1]西安交通大学,机械制造系统工程国家重点实验室,陕西西安710054

出　　处：《仪表技术与传感器》2014年第2期11-13,23,共4页Instrument Technique and Sensor

基　　金：长江学者和创新团队发展计划资助项目(IRT 1033);国家自然科学基金(51275402)

摘　　要：为满足高冲击时加速度测量的要求,研制了一种基于梁膜结构的MEMS高g值加速度传感器。内部敏感元件采用对称的十字梁与平膜结合结构,可以有效地降低偏轴影响及横向灵敏度。使用ANSYS软件对芯片结构进行静态分析与模态分析,结果表明其在满量程情况下能安全工作。利用加速度冲击台进行测试,结果表明该加速度传感器可以准确地测量加速度信号,其灵敏度达到1.08 V/g,线性度达到1.163%。该传感器具有体积小,线性度好,精度高的优点。To meet the requirement for high impact acceleration measurement, a high-g accelerometer was developed based on beam-membrane structure and micro-electro-mechanical system （MEMS）. Internal sensitive component had a symmetrical beam- membrane structure ; it could reduce the impact of off-axis and transverse sensitivity effectively. Through the static analysis and mo- dal analysis by ANSYS software, the analysis results showed that the accelerometer could work well in the full-scale. Acceleration shock machine was used to test the accelerometer, and the results showed that the accelerometer could measure the acceleration sig- nal accurately. The sensitivity of the accelerometer is 1. 08μV/g, and the linearity is 1. 163%. This accelerometer has the advanta- ges including small size, good linearity and high accuracy.

关 键 词：微机电系统 高g值加速度传感器 有限元仿真分析 测试 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]