一种新型二维MEMS扭转镜的设计及实现  

Design and Implementation of a Novel Two-Dimensional MEMS Torsion Mirror

作　　者：王松杰[1] 张玉冲[1] 张国庆[1] 

机构地区：[1]中国空空导弹研究院,河南洛阳471009

出　　处：《航空兵器》2014年第2期38-40,共3页Aero Weaponry

摘　　要：二维MEMS扭转镜广泛应用于光纤通讯、投影显示、数据存储、精密测量、医疗成像和生物技术等国防和民用领域。在分析二维MEMS扭转镜工作原理的基础上,利用L-edit软件对二维MEMS扭转镜器件的版图进行了设计。基于SOI(Silicon-On-Insulator)制作工艺,确定了扭转镜器件加工工艺流程,按照工艺流程成功制造出二维扭转镜样件,并对制作完成后的器件进行初步的性能测试,获得了不同的扫描图形。Two-dimensional MEMS torsion mirror has been widely used in fields of optical fiber commu- nication, projection display, data storage, precision measurement, medical imaging and biotechnology. Based on the working principle of two-dimensional MEMS torsion mirror, the layout is designed by L-edit software. Based on the SOI production process, the device fabrication process is determined, and a two-dimensional tor- sion mirror is created. Through preliminary performance test, different scanning patterns are obtained.

关 键 词：微光机电系统(MEMS) 二维扭转镜 SOI工艺 静电驱动 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]