一种悬浮石墨烯压力传感器的制造与建模  

Fabrication and modeling of a suspended graphene pressure sensor

作　　者：蒋圣伟[1] 师帅[1] 袁娇娇[1] 方靖[1] 徐春林[1] 汪学方[1] 

机构地区：[1]华中科技大学机械科学与工程学院微系统中心,湖北武汉430074

出　　处：《传感器与微系统》2014年第5期111-114,120,共5页Transducer and Microsystem Technologies

基　　金：国家"863"高技术研究发展计划资助项目(2013AA041105);华中科技大学自主创新基金资助项目(2013TS022)

摘　　要：提出了一种适用于纳机电系统(NEMS)的悬浮石墨烯压力传感器,并结合传统微机械加工工艺提出了压力传感器的制造过程。利用拉曼光谱表征了机械剥离法得到的不同厚度的石墨烯薄膜,验证了石墨烯"G"峰与"2D"峰的强度与薄膜厚度有关。基于薄膜膨胀试验方法,给出了悬浮于矩形、方形与圆形3种空腔的石墨烯薄膜的最大变形与压差的关系,并分别计算了3种形状下薄膜的压力灵敏度,可知矩形情况下单层石墨烯薄膜的压力灵敏度最大,当矩形宽度、方形边长或圆形直径越大,薄膜厚度越小时,压力灵敏度越高,计算表明:这种压力传感器具有高灵敏度。A suspended graphene pressure sensor which is appropriate for nano-electro-mechanical system （NEMS） is proposed, and combined with traditional micro mechanism process technology,its fabrication process is also put forward. Raman spectra is used to represent mechanically exfoliated graphene membrane with different thickness, and the fact that the intensity of G and 2D peaks are related to membrane thickness is identified. Based on the membrane bulge test, respectively gave the relationship between maximum deflection of graphene membrane suspending on rectangle, square and circle cavity and pressure difference; meanwhile, pressure sensitivity of membrane under the three cavity shapes are calculated respectively, and it can be found that graphene membrane of single-layer graphene membrane under rectangle cavity is the most and when rectangle width, square length or circle diameter is bigger, or membrane thickness is smaller, pressure sensitivity is higher, and the calculation result shows that the pressure sensor has high sensitivity.

关 键 词：石墨烯 压力传感器 拉曼光谱 膨胀试验 压力灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]