光刻物镜中光学元件精密轴向调整机构的设计与分析  

Design and Analysis of a Precision Axial Adjusting Mechanism for Optical Elements in Lithographic Lens

作　　者：彭海峰[1] 孙振[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《光子学报》2014年第4期107-111,共5页Acta Photonica Sinica

基　　金：国家重大专项基金(No.2009ZX02205)资助

摘　　要：柔性铰链与高准确度驱动器的结合是实现光学元件轴向精密调节的重要方法.本文介绍了一种采用柔性铰链的轴向精密调节机构,推导并得出了其实现精密调节的原理.通过对应用柔性调节机构的一种典型光机系统的刚度分析,得到在不超过柔性铰链材料屈服应力情况下,光学元件的最大轴向位移可以达到200μm以上;同时,对一种典型参量的柔性结构做了模态分析,得到其一阶固有频率为185.1Hz,证明了调节机构的固有频率满足工作要求.分析了驱动力在此种轴向调整机构中对镜片面形的影响,结果表明:调整机构在接近最大允许驱动力作用下对镜片面形影响为4.41nm,说明其对光学元件的面形影响较小.该研究结果为柔性光学元件轴向调节机构的应用提供了有力依据.The combination of flexure and PZT actuator is a significant method to achieve precision adjustment.A precision adjusting mechanism with flexure hinges was introduced and theoretical calculations were carried out to get the working principle of it.The optimization design and finite element analysis were also taken to acquire the axial stiffness of a typical opto-mechanic structure.The results show that the maximum axial displacement of the optics can be bigger than 200μm under the yield limit of the material.Secondly,a modal analysis is taken to obtain the natural frequency of the mechanism. The results indicated that the first resonant frequency of the structure is 185.1Hz.It can be seen that the natural frequency can satisfy the work specification of the lithographic lens.At last,the influence of the applied force of the PZT to the surface figure of an optical element was obtained.The result shows that the influence of the force F=14Nto the RMS of the optic element is 4.41nm.All these results provide useful evidences for the applyment of this mechanism for optic adjusting.

关 键 词：光刻物镜 光学元件 精密轴向调节 面形分析 柔顺铰链 固有频率特性 

分 类 号：TH132[机械工程—机械制造及自动化]