大光栅刻划机工作台的摆角矫正机构研制  

Development of the workbench yaw angle correction mechanism of large grating ruling machine

作　　者：杨超[1,2] 于海利[1] 糜小涛[1] 巴音贺希格[1] 唐玉国[1] 

机构地区：[1]中科院长春光学精密机械与物理研究所,长春130033 [2]中国科学院大学,北京100049

出　　处：《仪器仪表学报》2014年第5期1065-1071,共7页Chinese Journal of Scientific Instrument

基　　金：国家重点基础研究发展计划(973)项目(2014CB049500);国家重大科研装备研制项目(ZDY2008-1);科技部国家重点基础研究发展计划(2014CB049500);长春市场科技计划(Y3B43HU140)资助项目

摘　　要：大光栅刻划机若存在摆角误差,将直接影响刻划光栅的波前质量。首先,计算得到李特洛设置下的摆角误差与波前质量的映射关系。其次,论述了双压电触动器校正摆角的工作原理,并设计了摆角测量光路,测量在该结构下工作台的摆角校正能力。最后基于以上结构对工作台进行刻划实验。结果表明在具有400×500光栅刻划能力的刻划机上,采用双压电触动器校正工作台摆角误差,能够满足±5μm行程范围内±2″校正范围的要求;实验表明摆角误差校正后工作台的偏转角度由0.42″降低至0.02″,校正后的摆角误差相比于校正前降低了95.24%,满足对工作台摆角校正精度的要求,提高了光栅的波前质量。以上实验结果为刻划出高精度大面积光栅提供了基础保障。If large grating ruling machine has yaw angle error,it will directly affect the quality of the ruling grating wave-front.First,the mapping relation between yaw angle error and wave-front quality in Littrow form is obtained through calculation.Secondly,the working principle of correcting the yaw angle with double piezoelectric actuators is discussed,the yaw angle measurement optical path is designed,and the yaw angle correction capability of the workbench with this structure is measured.Finally,the ruling experiments were carried out on the workbench using the above structure.Experiment results indicate that on the grating ruling machine with 400 × 500 grating ruling capability,using double piezoelectric actuators to correct the yaw angle error of the workbench,the correction requirement for travel range of ± 5 μm and angle range of ± 2″ can be achieved.The experiment results show that the yaw angle of the workbench is reduced from 0.42 ″ to 0.02″ after yaw angle error correction; the yaw angle error is decreased by 95.24％ compared with that before correction,which satisfies the requirement of the yaw angle correction accuracy of the workbench and improves the quality of the grating wave-front.The experiment results provide a theoretical and technical support for ruling large and high-precision gratings.

关 键 词：光栅刻划机 刻划光栅 摆角误差 压电触动器 

分 类 号：TH113.2[机械工程—机械设计及理论]