抗高过载微压传感器  

Micropressure transducer with high over-load capacity

作　　者：尹颢[1] 杨恒[1] 王文襄 沈绍群[1] 鲍敏杭[1] 

机构地区：[1]复旦大学电子工程系传感器研究室,上海200433 [2]宝鸡秦岭晶体管厂,陕西宝鸡721001

出　　处：《传感器技术》2001年第4期48-51,共4页Journal of Transducer Technology

基　　金：国家自然科学基金 !(696740 3 2 );"九五"传感器科技攻关项目 !(96-748-0 2 -0 1/ 0 2 )

摘　　要：在提高微压传感器灵敏度的研究过程中 ,会遇到非线性和稳定性变差、过载能力不够以及静电封接时背岛与玻璃粘接造成器件失效等现象。提出了应力匀散结构和两层岛的限位结构 ,利用有限元分析和近似解析分析 ,设计了新的双岛 -梁 -膜结构 ,成功地研制出抗高过载微压传感器。量程为 0 .3kPa ,总精度为 0 .4% ,过载能力 >In the process of improving the sensitivity of a pressure transducer, one always has the problems such as the deterioration of linearity and stability, insufficiency of over-load capacity and the sticking of the back islands to the glass in the electrostatic bonding process. Two structure improvements have been made to overcome these difficulties: the structure for stress unification on diaphragm and the two-leveled island for over-range protection.Both finite element analysis and analytical analysis are used in the design of the high sensitivity pressure transducer with novel two-leveled islands and beam-diaphragm structure. A high sensitivity pressure transducer based on the structure has been developed and tested.The measument range is 0.3?kPa,the accuracy of the devices is 0.4% and the overload capacity is larger than 140 times of the full operation range.

关 键 词：微压传感器 过载能力 非线性 灵敏度 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]