在工业应用中日趋重要的微传感器  

The More and More Important Microsensors in Industrial Applications

作　　者：E.Obemeier 林杰[1] 

机构地区：[1]柏林工业大学

出　　处：《仪表技术与传感器》1995年第1期8-13,共6页Instrument Technique and Sensor

摘　　要：本文将以几个实例阐明微传感器在近年来的发展以及在工业上的典型应用,文中涉及一个3mbar的微压传感器,一个数字化可编程、有校正功能的1bar集成压力传感器,一个利用热传导原理的微机械气体传感器和一个可测至26GHz的功率传感器。最后这二例充分说明了利用再工程(re-engineening)技术从传统传感器产生的新型传感器的显而易见的优越性。This paper expounds the recent developments of micro-sensors by presenting several exapmples, and describes their typical industrial applica tions. Included in this paper are a 3 mbar micro pressure sensor, a digital, programmable and self-correcting 1 bar integrated pressure sensor, a heat con ducting theory based micromachined gas sensor, and a power sensor with measurement range up to 26 GHz. The last 2 types of sensors show the obvious advantages of the new sensors made available out of conventional sensors by the re-engineering techniques.

关 键 词：微机械技术 气体传感器 功率传感器 微压传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]