微波等离子体辅助化学气相沉积法低温合成定向碳纳米管阵列  

Well-aligned Carbon Nanotube Array Synthesized at Low Temperature by Microwave Plasma Enhanced Chemical Vapor Deposition

作　　者：陈新[1] 胡征[1] 王喜章[1] 吴强[1] 陈懿[1] 杨绍光[2] 都有为[2] 

机构地区：[1]南京大学化学系介观材料与化学实验室 [2]南京大学物理系,南京210093

出　　处：《高等学校化学学报》2001年第5期731-733,共3页Chemical Journal of Chinese Universities

基　　金：国家重点基础研究规划项目! (批准号 :G19990 64 5 0 8);高校重点实验室基金资助

摘　　要：Well aligned nanotubes with diameter of 30—50 nm have been synthesized on a porous alumina template by microwave plasma enhanced chemical vapor deposition (MW PECVD). By this means, the control over either diameter or length of the nanotubes could be realized. The hollow structure and vertically aligned features have been verified by scanning electron and transmission electron microscopic images. In comparison with the reported fabrication methods, lower synthesis temperature (below 520 ℃) and simpler process (no negative dc bias applied) have been achieved, which could be of great importance for both theoretical research and pratical applications.Well aligned nanotubes with diameter of 30—50 nm have been synthesized on a porous alumina template by microwave plasma enhanced chemical vapor deposition (MW PECVD). By this means, the control over either diameter or length of the nanotubes could be realized. The hollow structure and vertically aligned features have been verified by scanning electron and transmission electron microscopic images. In comparison with the reported fabrication methods, lower synthesis temperature (below 520 ℃) and simpler process (no negative dc bias applied) have been achieved, which could be of great importance for both theoretical research and pratical applications.

关 键 词：碳纳米管阵列 微波等离子体 化学气相沉积 低温合成 孔性氧化铝模板 

分 类 号：TB383[一般工业技术—材料科学与工程]