高透明低方阻ITO-Ag-ITO柔性镀膜技术  

Rolling coating technoliogy of high transparent and low square resistance

作　　者：胡云慧[1] 李京增[1] 余圣发[1] 彭晶[1] 苏丹丹[1] 彭传才[1] 李伟 蒋力 刘婧 

机构地区：[1]国防科技大学薄膜电子技术研究所,湖南长沙410073 [2]湖南三才光电信息材料有限公司,湖南长沙410015

出　　处：《真空》2001年第2期36-38,共3页Vacuum

摘　　要：高透明低方阻 ITO- Ag- ITO柔性薄膜具有广泛的用途。本文介绍了膜系设计、工艺参数及控制。对设备结构也做了简要叙述。测试结果表明 ,ITO- Ag- ITO多层膜采用连续卷绕镀的方法生产 ,性能优异 ,工艺稳定 ,系统可靠。The flexible thin films of high transparent and low square resistance are widely used. Film construction and control of process parameters are introduced and device of making films is also introduced. Measurement result indicates that the optical and electrical properties of ITO Ag ITO multi layer films are excellent, process is very stable by rolling coating, operation system is dependable.

关 键 词：银 ITO膜 柔性薄膜 连续卷绕镀膜 镀膜工艺 磁控溅射 

分 类 号：TB43[一般工业技术]