菲涅耳透镜的制作及性能分析(对准误差的影响)(英文)  

FABRICATION OF FRESNEL LENS AND ANALYSIS OF PERFORMANCE (EFFECT OF ALIGNMENT ERRORS)

作　　者：李红军[1] 卢振武[1] 廖江红[1] 翁志成[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所

出　　处：《光子学报》2001年第3期325-330,共6页Acta Photonica Sinica

摘　　要：我们使用薄膜沉积法制作 1 6阶菲涅耳透镜 ,其衍射效率接近 87% .用它代替常规的光学透镜可实现系统的轻量化、小型化、增加系统设计的自由度 .在标量衍射理论的基础上 ,应用菲涅耳公式和傅里叶变换分析 Si O2 薄膜和基底的表面反射、对准误差以及入射角对 1 6阶菲涅耳透镜衍射效率的影响 .The thin film deposition has been used to fabricate 16 step Fresnel lens.Its diffractiveefficiency is approximately 87%.Instead of conventional optical elements,it can perform system′s lightweight,miniaturization and increase degree of freedom in the design.Based on the scalar theory,Fresnel formula and Fourier transform are used to analyze the effects of the surface reflection of SiO 2 thin film and substrate,the alignment errors and the angle of incidence of light beam on the diffractive efficiency of 16 step Fresnel lens.

关 键 词：薄膜沉积 菲涅耳透镜 表面反射 对准误差 入射角 衍射效率 

分 类 号：TH74[机械工程—光学工程] O436.1[机械工程—仪器科学与技术]