MIM-MIS隧道结的发光光谱特性  

Studies on Light Emission Spectra of MIM and MIS Tunnel Junctions

作　　者：王茂祥[1] 俞建华[2] 孙承休[1] 

机构地区：[1]东南大学电子工程系,南京210096 [2]南京新联电子有限公司,南京210009

出　　处：《真空科学与技术》2001年第3期233-236,共4页Vacuum Science and Technology

基　　金：国家自然科学基金资助项目 !(6 95 76 0 0 6 )

摘　　要：对MIM(Au SiO2 Al)和MIS(Au SiO2 Si)隧道结的表面等离极化激元 (surfaceplasmonpolariton ,SPP)的激发与色散关系进行了讨论 ,对结的发光光谱进行了测试。结果表明其发射峰主峰位于 6 10nm(2 0 0eV)～ 6 30mm(2 0 0eV)和 70 0mm(1 77eV)～ 740nm(1 6 8eV)处 ,分别与Au/空气及Au/Al2 O3(SiO2 )界面SPP模式的激发相对应。结的发光过程应该是隧穿电子激发表面等离极化激元SPP ,然后SPP与粗糙度耦合形成光发射。The excitation and dispersion of the surface plasmon polariton (SPP) of the MIM (Au Al 2O 3 Al)and the MIS(Au SiO 2 Si) tunnel junctions were studied.The light emission spectra with main peaks located at 610～630 nm and 700～740 nm were analyzed.The results show that the peaks mainly originated from the excitation of SPP at both Au/air and Au/Al 2O 3(SiO 2) interfaces;and the coupling of SPP with the surface roughness is responsible for light emission of the MIM and MIS tunnel junctions.

关 键 词：隧道结 发光光谱 表面等离极化激元 半导体 金-氧化硅-铝 金-一氧化硅-硅 

分 类 号：TN304[电子电信—物理电子学] O472.3[理学—半导体物理]